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Design of ultra-high storage density probe memory with patterned Ge2Sb2Te5layer and continuous capping layer
- Source :
- Applied Physics Express (APEX); May 2019, Vol. 12 Issue: 5 p055002-055002, 1p
- Publication Year :
- 2019
-
Abstract
- A novel design of patterned phase-change electrical probe memory with a continuous capping layer is proposed. To achieve ultra-high density, whilst having immunity to thermal and readout cross-talk interference, the devised memory is optimized to have a continuous 40 nm TiN underlayer, continuous 2 nm DLC capping layer and 5 nm Ge2Sb2Te5layer patterned into numerous cells, separated by a 5 nm thick insulator region. The feasibility of using the designed device to achieve ultra-high density, superb anti-interference and a simplified fabrication process, has been demonstrated according to a developed full 3D electro-thermal and phase-change model.
Details
- Language :
- English
- ISSN :
- 18820778 and 18820786
- Volume :
- 12
- Issue :
- 5
- Database :
- Supplemental Index
- Journal :
- Applied Physics Express (APEX)
- Publication Type :
- Periodical
- Accession number :
- ejs55911051
- Full Text :
- https://doi.org/10.7567/1882-0786/ab0ef7