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Measurement of interactive matrix and flat-surface calibration of OKO 109-channel deformable mirror using ZYGO-GPI interferometer

Authors :
Han, Sen
Ehret, Gerd
Chen, Benyong
Chen, Xinyang
Wang, Chaoyan
Zheng, Lixin
Cai, Jianqing
Ding, Yuanyuan
Source :
Proceedings of SPIE; November 2020, Vol. 11552 Issue: 1 p115521Y-115521Y-4, 1039694p
Publication Year :
2020

Details

Language :
English
ISSN :
0277786X
Volume :
11552
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs54677044
Full Text :
https://doi.org/10.1117/12.2575904