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Signal-to-noise ratio evaluation for the nanometer-scale patterned defect inspection using dark-field microscopy with tailored polarization illumination
- Source :
- Proceedings of SPIE; August 2020, Vol. 11485 Issue: 1 p114850N-114850N-10, 11370161p
- Publication Year :
- 2020
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11485
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs54238983
- Full Text :
- https://doi.org/10.1117/12.2567116