Back to Search
Start Over
Femtosecond optical curing of SU-8 photoresist
- Source :
- Proceedings of SPIE; February 2020, Vol. 11292 Issue: 1 p112921H-112921H-7, 1016297p
- Publication Year :
- 2020
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11292
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs52927204
- Full Text :
- https://doi.org/10.1117/12.2545202