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Challenges and opportunities of MOVPE and THVPE/HVPE for nitride light emitting device

Authors :
Kim, Jong Kyu
Krames, Michael R.
Strassburg, Martin
Matsumoto, K.
Yamaguchi, A.
Yano, Y.
Tokunaga, H.
Mishima, A.
Tomita, Y.
Yamaoka, Y.
Koseki, S.
Arimura, T.
Source :
Proceedings of SPIE; March 2020, Vol. 11302 Issue: 1 p113020N-113020N-8, 1017189p
Publication Year :
2020

Details

Language :
English
ISSN :
0277786X
Volume :
11302
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs52700202
Full Text :
https://doi.org/10.1117/12.2543943