Study on Effects of Slurry Key Factors on Advanced Oxide CMP Performance

MLA

Song, Peter, et al. “Study on Effects of Slurry Key Factors on Advanced Oxide CMP Performance.” ECS Transactions, vol. 27, no. 1, Nov. 2010, pp. 557–62. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edo&AN=ejs52648322&authtype=sso&custid=ns315887.

APA

Song, P., Yao, D., Lee, L., Yuan, G., Yu, C., Xing, C., Lin, C., Sun, T., Ma, Z., Zhu, Y., & Zhang, C. (2010). Study on Effects of Slurry Key Factors on Advanced Oxide CMP Performance. ECS Transactions, 27(1), 557–562.

Chicago

Song, Peter, Daisy Yao, Leo Lee, Gu Yuan, Chris Yu, Charles Xing, Chang Lin, et al. 2010. “Study on Effects of Slurry Key Factors on Advanced Oxide CMP Performance.” ECS Transactions 27 (1): 557–62. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edo&AN=ejs52648322&authtype=sso&custid=ns315887.