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Process Optimization of Contact Module in NOR Flash Using High Resolution e-Beam Inspection
- Source :
- ECS Transactions; March 2011, Vol. 34 Issue: 1 p919-924, 6p
- Publication Year :
- 2011
-
Abstract
- The inspection sensitivities and capture rate capabilities of high resolution e-beam inspection system with extracting and retarding mode are evaluated. E-beam with retarding mode inspection demonstrates better performance and reflects the wafer sort yield loss in contact failure items directly. After the contact module process optimization, the yield was improved almost two times above.
Details
- Language :
- English
- ISSN :
- 19385862 and 19386737
- Volume :
- 34
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- ECS Transactions
- Publication Type :
- Periodical
- Accession number :
- ejs52648009