Effective Approach for Hillock Defect Reduction in Cu Metallization Process

MLA

Li, Ning, et al. “Effective Approach for Hillock Defect Reduction in Cu Metallization Process.” ECS Transactions, vol. 44, no. 1, Mar. 2012, pp. 737–43. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edo&AN=ejs52646606&authtype=sso&custid=ns315887.

APA

Li, N., Lin, C., Jiang, Y., He, P., Sun, H., Yang, Y., & Xing, C. (2012). Effective Approach for Hillock Defect Reduction in Cu Metallization Process. ECS Transactions, 44(1), 737–743.

Chicago

Li, Ning, Chang Lin, Yong Jiang, Peng He, Hui Sun, Yi Yang, and Charles Xing. 2012. “Effective Approach for Hillock Defect Reduction in Cu Metallization Process.” ECS Transactions 44 (1): 737–43. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edo&AN=ejs52646606&authtype=sso&custid=ns315887.