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Study on the performances of dwell time algorithms in ion beam figuring

Authors :
Unger, Blair L.
DeGroote Nelson, Jessica
Wang, Tianyi
Huang, Lei
Tayabaly, Kashmira
Idir, Mourad
Source :
Proceedings of SPIE; November 2019, Vol. 11175 Issue: 1 p111750M-111750M-10, 11063261p
Publication Year :
2019

Details

Language :
English
ISSN :
0277786X
Volume :
11175
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs51822897
Full Text :
https://doi.org/10.1117/12.2536869