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Removal of particle contaminations on sol-gel coated fused silica surface by laser cleaning
- Source :
- Proceedings of SPIE; July 2019, Vol. 11063 Issue: 1 p110630B-110630B-7, 995678p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11063
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs51674636
- Full Text :
- https://doi.org/10.1117/12.2539597