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P‐5.2: Aqueous Sr‐doped In2O3TFT stability under negative bias illumination stress

Authors :
Zhou, Youhang
Li, Jun
Yang, Yaohua
Li, Xifeng
Zhang, Jianhua
Source :
SID Symposium Digest of Technical Papers; September 2019, Vol. 50 Issue: Supplement 1 p728-731, 4p
Publication Year :
2019

Abstract

In this paper, the Sr‐doped In2O3thin film is fabricated by aqueous route and the stability of InSrO thin film transistor under negative bias illumination stress (NBIS) is investigated. It is found that Sr can effectively improve the stability of In2O3TFTs under NBIS, which is due to the reduction of oxygen vacancies. The XPS measurement is tested to analyze the variation of oxygen vacancy concentration. The density of states is calculated to further confirm the decrease of total trap state caused by Sr doping.

Details

Language :
English
ISSN :
0097966X
Volume :
50
Issue :
Supplement 1
Database :
Supplemental Index
Journal :
SID Symposium Digest of Technical Papers
Publication Type :
Periodical
Accession number :
ejs51107047
Full Text :
https://doi.org/10.1002/sdtp.13625