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Solid-State Dewetting in Polycrystalline Co Films on Native Oxide Si(100) by Kirkendall Effects
- Source :
- The Journal of Physical Chemistry - Part C; August 2019, Vol. 123 Issue: 32 p19572-19578, 7p
- Publication Year :
- 2019
-
Abstract
- The polycrystalline Co films with a thickness of 120 nm were deposited on the native oxide Si(100) substrate.
Details
- Language :
- English
- ISSN :
- 19327447 and 19327455
- Volume :
- 123
- Issue :
- 32
- Database :
- Supplemental Index
- Journal :
- The Journal of Physical Chemistry - Part C
- Publication Type :
- Periodical
- Accession number :
- ejs50636085
- Full Text :
- https://doi.org/10.1021/acs.jpcc.9b04226