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Nano Focus: Shrinkage leads to nanoscale resolution in 3D geometries and with a variety of materials
- Source :
- MRS Bulletin; March 2019, Vol. 44 Issue: 3 p154-154, 1p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 08837694 and 19381425
- Volume :
- 44
- Issue :
- 3
- Database :
- Supplemental Index
- Journal :
- MRS Bulletin
- Publication Type :
- Periodical
- Accession number :
- ejs49096203
- Full Text :
- https://doi.org/10.1557/mrs.2019.63