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Polarization effects in 3D femtosecond direct laser writing nanolithography
- Source :
- Proceedings of SPIE; May 2018, Vol. 10675 Issue: 1 p106750V-106750V-6, 960757p
- Publication Year :
- 2018
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10675
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs46158064
- Full Text :
- https://doi.org/10.1117/12.2306904