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Mesoscale ultrafast laser 3D lithography: throughput in voxels-per-second

Authors :
Herkommer, Alois M.
von Freymann, Georg
Flury, Manuel
Jonušauskas, Linas
Gailevičius, Darius
Baravykas, Tomas
Juodkazis, Saulius
Malinauskas, Mangirdas
Source :
Proceedings of SPIE; May 2018, Vol. 10675 Issue: 1 p106750D-106750D-8, 960759p
Publication Year :
2018

Details

Language :
English
ISSN :
0277786X
Volume :
10675
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs46158057
Full Text :
https://doi.org/10.1117/12.2305929