Fabrication of InP-based monolithically integrated laser transmitters

InP-based photonic integrated circuits (PICs) have aroused great interest in recent years to meet the needs of future high-capacity and high-performance optical systems. With the advantages of small size, low power consumption, low cost, high reliability, InP-based PICs are promising solutions to replace the multiple discrete devices used in various systems. In this paper, we will review the design, fabrication, key integration technology and performance of several kinds of InP-based monolithically integrated transmitters developed in our group in recent years. Particular attention will be paid to the electro-absorption modulated laser (EML), multi-wavelength distributed feedback (DFB) laser arrays, widely tunable distributed reflector (DBR) lasers and their arrays, integrated amplified feedback lasers (AFL), and few-mode transmitters.