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Straightforward directed self-assembly process flows enabled by advanced materials

Authors :
Hohle, Christoph K.
Gronheid, Roel
Xu, Kui
Calderas, Eric
Hockey, Mary Ann
Guerrero, Douglas
Daugherty, Richard
Liang, Yichen
Source :
Proceedings of SPIE; March 2018, Vol. 10586 Issue: 1 p105860W-105860W-7, 952748p
Publication Year :
2018

Details

Language :
English
ISSN :
0277786X
Volume :
10586
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs45627803
Full Text :
https://doi.org/10.1117/12.2297013