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Impact of aberrations in EUV lithography: metal to via edge placement control
- Source :
- Proceedings of SPIE; March 2018, Vol. 10583 Issue: 1 p105830Q-105830Q-10, 10477181p
- Publication Year :
- 2018
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10583
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs45579794
- Full Text :
- https://doi.org/10.1117/12.2299872