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Alignment of KB mirrors with at-wavelength metrology tool simulated using SRW
- Source :
- Proceedings of SPIE; August 2017, Vol. 10388 Issue: 1 p103880Z-103880Z-7, 934928p
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10388
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs43962155
- Full Text :
- https://doi.org/10.1117/12.2274264