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Relation between Optical Orientation Accuracy and Etch Time
- Source :
- Journal of Applied Physics; December 1959, Vol. 30 Issue: 12 p2019-2019, 1p
- Publication Year :
- 1959
Details
- Language :
- English
- ISSN :
- 00218979 and 10897550
- Volume :
- 30
- Issue :
- 12
- Database :
- Supplemental Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Periodical
- Accession number :
- ejs43720098
- Full Text :
- https://doi.org/10.1063/1.1735115