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Exposure characteristics of positive tone electron beam resist containing p-chloro-α-methylstyrene
- Source :
- Proceedings of SPIE; July 2017, Vol. 10454 Issue: 1 p1045414-1045414-6
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10454
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs43124672
- Full Text :
- https://doi.org/10.1117/12.2279079