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Ricor's Nanostar water vapor compact cryopump: applications and model overview
- Source :
- Proceedings of SPIE; May 2017, Vol. 10180 Issue: 1 p101800K-101800K-18, 10078219p
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10180
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs42662528
- Full Text :
- https://doi.org/10.1117/12.2262483