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Improvement of a block co-polymer (PS-b-PDMS) template etch profile using amorphous carbon layer
- Source :
- Proceedings of SPIE; April 2017, Vol. 10149 Issue: 1 p101490U-101490U-6, 913417p
- Publication Year :
- 2017
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10149
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs42188508
- Full Text :
- https://doi.org/10.1117/12.2258147