Advanced surface affinity control for DSA contact hole shrink applications

MLA

Bencher, Christopher, et al. “Advanced Surface Affinity Control for DSA Contact Hole Shrink Applications.” Proceedings of SPIE, vol. 10144, no. 1, Apr. 2017, p. 101440O–101440O–9. EBSCOhost, https://doi.org/10.1117/12.2258043.

APA

Bencher, C., Cheng, J. Y., Delachat, F., Gharbi, A., Pimenta Barros, P., Argoud, M., Lapeyre, C., Bos, S., Hazart, J., Pain, L., Monget, C., Chevalier, X., Nicolet, C., Navarro, C., Cayrefourcq, I., & Tiron, R. (2017). Advanced surface affinity control for DSA contact hole shrink applications. Proceedings of SPIE, 10144(1), 101440O–101440O–9. https://doi.org/10.1117/12.2258043

Chicago

Bencher, Christopher, Joy Y. Cheng, Florian Delachat, Ahmed Gharbi, Patricia Pimenta Barros, Maxime Argoud, Céline Lapeyre, et al. 2017. “Advanced Surface Affinity Control for DSA Contact Hole Shrink Applications.” Proceedings of SPIE 10144 (1): 101440O–101440O–9. doi:10.1117/12.2258043.