Stoichiometric 6H-SiC thin films deposited at low substrate temperature by laser ablation

Details

Language :

English

ISSN :

1042346X

Volume :

25

Issue :

5

Database :

Supplemental Index

Journal :

Journal of Laser Applications

Publication Type :

Periodical

Accession number :

ejs41236963

Full Text :

https://doi.org/10.2351/1.4821631