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In-process measuring procedure for sub-100?nm structures
- Source :
- Journal of Laser Applications; September 2012, Vol. 24 Issue: 4 p042010-42015, 6p
- Publication Year :
- 2012
Details
- Language :
- English
- ISSN :
- 1042346X
- Volume :
- 24
- Issue :
- 4
- Database :
- Supplemental Index
- Journal :
- Journal of Laser Applications
- Publication Type :
- Periodical
- Accession number :
- ejs41236434
- Full Text :
- https://doi.org/10.2351/1.4719936