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Self-referenced interferometer for form measurement of hollow cylinders
- Source :
- Proceedings of SPIE; December 2016, Vol. 10142 Issue: 1 p101421Y-101421Y-6, 912796p
- Publication Year :
- 2016
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10142
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs41185293
- Full Text :
- https://doi.org/10.1117/12.2262989