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Uncertainty evaluation of ellipsometer: from instrumentation to material and application in Avogadro's project

Authors :
Han, Sen
Yoshizawa, Toru
Zhang, Song
Liu, Wende
Chen, Chi
Fan, Qiming
Chu, Chu
Source :
Proceedings of SPIE; November 2016, Vol. 10023 Issue: 1 p100231Y-100231Y-8, 902088p
Publication Year :
2016

Details

Language :
English
ISSN :
0277786X
Volume :
10023
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs41161184
Full Text :
https://doi.org/10.1117/12.2246391