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Fabrication of deep-profile Al-doped ZnO one- and two-dimensional lattices as plasmonic elements

Authors :
Kawata, Satoshi
Tsai, Din Ping
Jensen, Flemming
Shkondin, Evgeniy
Takayama, Osamu
Larsen, Pernille V.
Mar, Mikkel D.
Malureanu, Radu
Lavrinenko, Andrei V.
Source :
Proceedings of SPIE; September 2016, Vol. 9921 Issue: 1 p99210J-99210J-7, 892898p
Publication Year :
2016

Details

Language :
English
ISSN :
0277786X
Volume :
9921
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs40767956
Full Text :
https://doi.org/10.1117/12.2236820