Reaction Mechanism Studies on the Atomic Layer Deposition of Zr<INF>x</INF><INF></INF>Ti<INF>y</INF><INF></INF>O<INF>z</INF><INF></INF> Using the Novel Metal Halide−Metal Alkoxide Approach

Details

Language :

English

ISSN :

07437463 and 15205827

Volume :

18

Issue :

25

Database :

Supplemental Index

Journal :

Langmuir

Publication Type :

Periodical

Accession number :

ejs3997554

Full Text :

https://doi.org/10.1021/la026357t