Mo-B-C and Ta-B-C Nanostructured Layers with Promising Fracture Toughness

X-B-C (X=Mo, Ta) layers prepared by magnetron sputtering were tested. Mechanical properties were characterized by means of nanoindentation experiments in both the static and the dynamic loading regime. The results were correlated with observations of the microstructure under indentation prints by means of scanning and transmission electron microscopy on cross sections prepared using a focussed ion beam. An excellent fracture resistance of prepared nanostructured coatings was found.