In-situ Temperature Calibration Capability for Dimensional Metrology

Abstract:The Dimensional Metrology Group (DMG) at the National Institute of Standards and Technology (NIST) has developed a new in-situ temperature calibration system. This paper discusses the system components, an in-situ calibration procedure, and the uncertainty sources involved in the calibration process. It also presents an uncertainty budget, and examines it with a Monte Carlo simulation. This system enables the DMG to perform quicker in-situ temperature calibration, at frequent intervals with minimal downtime, and provides lower uncertainties for the dimensional measurements.