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CMOS compatible fabrication process of MEMS resonator for timing reference and sensing application
- Source :
- Proceedings of SPIE; December 2015, Vol. 9668 Issue: 1 p96684W-96684W-10, 9571727p
- Publication Year :
- 2015
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9668
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs38127421
- Full Text :
- https://doi.org/10.1117/12.2202532