Electron Beam Nanolithography of β-Ketoester Modified Aluminium Tri-Sec-Butoxide

Electron beam-sensitive spin-coatable Al2O3resists were prepared by chemically modifying aluminium tri-sec-butoxide with various β-ketoesters (R-acetoacetates, R= methyl, ethyl, isopropyl, isobutyl, isoamyl, heptyl, benzyl and 2-[methacryloyloxy] ethyl) in isopropyl alcohol. The reaction product was a chelated complex. With increasing molecular weight of R, there was an increase in electron beam sensitivity of spin-coatable Al2O3resists. This appears to be due to decreased stability of the chelated complex formed by higher molecular weight R-acetoacetates. Fourier transform infrared (FTIR) spectroscopy studies indicate that exposure to an electron beam results in the breakdown of chelate rings, making the exposed area insoluble during development. Electron beam nanolithography produced 8 nm wide lines. These are the smallest oxide lines written using a sol-gel-based resist.