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Performance of silicon immersed gratings: measurement, analysis, and modeling
- Source :
- Proceedings of SPIE; September 2015, Vol. 9626 Issue: 1 p96261M-96261M-12, 9529852p
- Publication Year :
- 2015
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9626
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs37388419
- Full Text :
- https://doi.org/10.1117/12.2191266