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Sol-gel deposition and plasma treatment of intrinsic, aluminum-doped, and gallium-doped zinc oxide thin films as transparent conductive electrodes
- Source :
- Proceedings of SPIE; September 2015, Vol. 9561 Issue: 1 p956109-956109-5
- Publication Year :
- 2015
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9561
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs37276863
- Full Text :
- https://doi.org/10.1117/12.2186144