Phosphorus diffusion from a spin-on doped glass (SOD) source during rapid thermal annealing

Details

Language :

English

ISSN :

13698001

Volume :

1

Issue :

3

Database :

Supplemental Index

Journal :

Materials Science in Semiconductor Processing

Publication Type :

Periodical

Accession number :

ejs3599080

Full Text :

https://doi.org/10.1016/S1369-8001(98)00045-6