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Use of a mass-thickness marker to estimate systematic errors and statistical noise in the detection of phosphorus by electron spectroscopic imaging
- Source :
- Micron; 1997, Vol. 28 Issue: 5 p407-418, 12p
- Publication Year :
- 1997
Details
- Language :
- English
- ISSN :
- 09684328
- Volume :
- 28
- Issue :
- 5
- Database :
- Supplemental Index
- Journal :
- Micron
- Publication Type :
- Periodical
- Accession number :
- ejs3535199
- Full Text :
- https://doi.org/10.1016/S0968-4328(97)00049-8