The influence of ion beam assisted deposition parameters on the properties of boron nitride thin films

Details

Language :

English

ISSN :

09259635

Volume :

8

Issue :

8

Database :

Supplemental Index

Journal :

Diamond and Related Materials

Publication Type :

Periodical

Accession number :

ejs3453730

Full Text :

https://doi.org/10.1016/S0925-9635(99)00049-7