Study of near-surface layers modified by ion implantation in Si wafers by grazing incidence X-ray reflectometry

Details

Language :

English

ISSN :

09258388

Volume :

286

Issue :

1

Database :

Supplemental Index

Journal :

Journal of Alloys and Compounds

Publication Type :

Periodical

Accession number :

ejs3448777

Full Text :

https://doi.org/10.1016/S0925-8388(98)01034-2