Design and Analysis of Multilayer Semiconductor Sensor for Acetone Gas Sensing

Portable breath acetone sensor has great potential in diabetes diagnosis for acetone is a selective breath maker for diabetes. In this paper, we propose a multilayer semiconductor sensor for acetone gas sensing. Device is designed with stress adjustment layer, support layer, metal layer, insulator and sensing film. Simulation is performed, electrothermal and thermomechanical analyses demonstrate that this device has good performance in power consumption and thermomechanical reliability.