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A micromachined magnetic-field sensor based on an electron tunneling displacement transducer

Authors :
DiLella, D.
Whitman, L. J.
Colton, R. J.
Kenny, T. W.
Kaiser, W. J.
Vote, E. C.
Podosek, J. A.
Miller, L. M.
Source :
Sensors and Actuators A: Physical; 2000, Vol. 86 Issue: 1 p8-20, 13p
Publication Year :
2000

Details

Language :
English
ISSN :
09244247
Volume :
86
Issue :
1
Database :
Supplemental Index
Journal :
Sensors and Actuators A: Physical
Publication Type :
Periodical
Accession number :
ejs3428257
Full Text :
https://doi.org/10.1016/S0924-4247(00)00303-4