Back to Search
Start Over
Low-stress PECVD SiC thin films for IC-compatible microstructures
- Source :
- Sensors and Actuators A: Physical; 1998, Vol. 67 Issue: 1 p175-180, 6p
- Publication Year :
- 1998
Details
- Language :
- English
- ISSN :
- 09244247
- Volume :
- 67
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Sensors and Actuators A: Physical
- Publication Type :
- Periodical
- Accession number :
- ejs3427338
- Full Text :
- https://doi.org/10.1016/S0924-4247(97)01730-5