Back to Search Start Over

A polysilicon flow sensor for gas flow meters

Authors :
Neda, T.
Nakamura, K.
Takumi, T.
Source :
Sensors and Actuators A: Physical; 1996, Vol. 54 Issue: 1 p626-631, 6p
Publication Year :
1996

Details

Language :
English
ISSN :
09244247
Volume :
54
Issue :
1
Database :
Supplemental Index
Journal :
Sensors and Actuators A: Physical
Publication Type :
Periodical
Accession number :
ejs3426747
Full Text :
https://doi.org/10.1016/S0924-4247(97)80027-1