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A polysilicon flow sensor for gas flow meters
- Source :
- Sensors and Actuators A: Physical; 1996, Vol. 54 Issue: 1 p626-631, 6p
- Publication Year :
- 1996
Details
- Language :
- English
- ISSN :
- 09244247
- Volume :
- 54
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Sensors and Actuators A: Physical
- Publication Type :
- Periodical
- Accession number :
- ejs3426747
- Full Text :
- https://doi.org/10.1016/S0924-4247(97)80027-1