Ultra thin silicon films directly bonded onto silicon wafers

Authors :: Fournel, F.
Moriceau, H.
Magnea, N.
Eymery, J.
Rouviere, J. L.
Rousseau, K.
Aspar, B.
Source :: Materials Science and Engineering B: Solid-State Materials for Advanced Technology; 2000, Vol. 73 Issue: 1 p42-46, 5p
Publication Year :: 2000

Language :: English
ISSN :: 09215107
Volume :: 73
Issue :: 1
Database :: Supplemental Index
Journal :: Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Publication Type :: Periodical
Accession number :: ejs3416252
Full Text :: https://doi.org/10.1016/S0921-5107(99)00431-6