Development and fabrication of RuO~2 thin film resistors

Authors :: Jia, Q. X.
Jiao, K. L.
Anderson, W. A.
Collins, F. M.
Source :: Materials Science and Engineering B: Solid-State Materials for Advanced Technology; 1993, Vol. 18 Issue: 3 p220-220, 1p
Publication Year :: 1993

Language :: English
ISSN :: 09215107
Volume :: 18
Issue :: 3
Database :: Supplemental Index
Journal :: Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Publication Type :: Periodical
Accession number :: ejs3413702
Full Text :: https://doi.org/10.1016/0921-5107(93)90135-A