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3D Monte Carlo modeling of the SEM: Are there applications to photomask metrology?
- Source :
- Proceedings of SPIE; October 2014, Vol. 9236 Issue: 1 p923602-923602-12
- Publication Year :
- 2014
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 9236
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs34042041
- Full Text :
- https://doi.org/10.1117/12.2069324