Chemical and structural characterization of oxygen precipitates in silicon by infrared spectroscopy and TEM

Details

Language :

English

ISSN :

09214526

Volume :

308

Issue :

1

Database :

Supplemental Index

Journal :

Physica B: Condensed Matter

Publication Type :

Periodical

Accession number :

ejs3396340

Full Text :

https://doi.org/10.1016/S0921-4526(01)00801-8