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Maximizing laser ablation efficiency of silicon through optimization of the temporal pulse shape

Authors :
Nakata, Yoshiki
Xu, Xianfan
Roth, Stephan
Neuenschwander, Beat
Cournoyer, Alain
Gay, David
Turbis, Pascal
Lorin, Emmanuel
Briand, Martin
Taillon, Yves
Source :
Proceedings of SPIE; March 2014, Vol. 8967 Issue: 1 p89670O-89670O-12, 8877343p
Publication Year :
2014

Details

Language :
English
ISSN :
0277786X
Volume :
8967
Issue :
1
Database :
Supplemental Index
Journal :
Proceedings of SPIE
Publication Type :
Periodical
Accession number :
ejs32711143
Full Text :
https://doi.org/10.1117/12.2040343