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Under-layer effects for block levels: are they under control?
- Source :
- Proceedings of SPIE; September 2013, Vol. 8880 Issue: 1 p88802L-88802L-11, 8791410p
- Publication Year :
- 2013
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 8880
- Issue :
- 1
- Database :
- Supplemental Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Periodical
- Accession number :
- ejs31459834
- Full Text :
- https://doi.org/10.1117/12.2029356